Evaluation for diaphragm's deflection for touch mode MEMS pressure sensors
In this paper, an analytical and simulation solution for touch mode Micro-electromechanical systems pressure sensor operating in harsh environment is proposed. The principle of the paper is to design, obtain analytical solution and compare the results with the simulation using finite elements analys...
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Zarqa University
2011
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| Online Access: | http://psasir.upm.edu.my/id/eprint/23065/1/Evaluation%20for%20diaphragm%27s%20deflection%20for%20touch%20mode%20MEMS%20pressure%20sensors.pdf |