A method for depositing tin oxide film.
The present invention relates to a method for depositing tin oxide film on a substrate comprises of providing a substrate; preparing a precursor solution comprises of metal dichloride, hydrogen peroxide and a complexing agent; adjusting the precursor solution at a predetermined pH; maintaining the p...
| Main Authors: | , , , |
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| Format: | Patent |
| Language: | English |
| Published: |
2011
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