Pressure sensors based on MEMS, operating in harsh environments (touch-mode)
In this paper, Poly-crystalline silicon carbide (poly-sic) Micro-electromechanical systems (MEMS) capacitive pressure sensor operating in harsh environment in touch mode is proposed, The principle of the paper is to design, obtain analytical solution and compare the results with the simulation for a...
| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
IEEE
2008
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| Online Access: | http://psasir.upm.edu.my/id/eprint/45889/1/Pressure%20sensors%20based%20on%20MEMS%2C%20operating%20in%20harsh%20environments%20%28touch-mode%29.pdf |