Valuation on MEMS pressure sensors and device applications
The MEMS pressure sensor has been introduced and presented in this paper. The types of pressure sensor and its theory of operation are also included. The latest MEMS technology, the fabrication processes of pressure sensor are explored and discussed. Besides, various device applications of pres...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
World Academy of Science, Engineering and Technology
2015
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| Online Access: | http://psasir.upm.edu.my/id/eprint/46851/1/Valuation%20on%20MEMS%20pressure%20sensors%20and%20device%20applications.pdf |