Process for the determination of thickness of polymeric microchannels for microfluidic applications
We have developed a technique of fabricating device channels for microfludics system by using high performance epoxy polymeric based dry film resists (DFRs). We will use the fabrication method originated in silicon microelectronics fabrication industry. This is because the interest in this industry...
| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
IEEE
2011
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| Online Access: | http://psasir.upm.edu.my/id/eprint/47784/1/Process%20for%20the%20determination%20of%20thickness%20of%20polymeric%20microchannels%20for%20microfluidic%20applications.pdf |