A novel neural network model of capacitive MEMS accelerometers
This paper presents a nonlinear model for a capacitive Micro-electromechanical accelerometer (MEMA). System parameters of the accelerometer are developed using the effect of cubic term of the folded-flexure spring. To solving this equation we use FEA method. The neural network (NN) uses Levenberg-Ma...
Main Authors: | , , |
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Format: | Conference or Workshop Item |
Language: | English |
Published: |
IEEE
2008
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Online Access: | http://psasir.upm.edu.my/id/eprint/69365/1/A%20novel%20neural%20network%20model%20of%20capacitive%20MEMS%20accelerometers.pdf |