Analytical comparison for square, rectangular and circular diaphragms in MEMS applications
MEMS offer different fabrication process to fabricate diaphragms in various applications such as microphones, pressure sensors and micro-pumps, etc. The working principle of all these devices is based on the force applies on the one side of the diaphragm and cause the diaphragm deflects. The paramet...
| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
IEEE
2010
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| Online Access: | http://psasir.upm.edu.my/id/eprint/69479/1/Analytical%20comparison%20for%20square%2C%20rectangular%20and%20circular%20diaphragms%20in%20MEMS%20applications.pdf |