Structural and optical properties of RF-sputtered Ge thin films using magnetron sputtering technique
The desire to control germanium (Ge) thin film quality while keeping it cost effective has become one of the biggest challenges. This thesis proposes radio frequency (RF) magnetron sputtering as a technique to deposit Ge thin films (towards nanowires growth) on a glass substrate at room temperatu...
| Main Author: | |
|---|---|
| Format: | Thesis |
| Language: | English |
| Published: |
2018
|
| Subjects: | |
| Online Access: | http://psasir.upm.edu.my/id/eprint/83649/1/FS%202019%2012%20-%20ir.pdf |