Sensing mechanism of an optimized room temperature optical hydrogen gas sensor made of zinc oxide thin films
Using the radiofrequency (RF) magnetron sputtering method, zinc oxide (ZnO) thin films were optimized for the optical hydrogen gas sensor at 27 °C. To generate optically controlled thin films, the following parameters have been optimized: argon/oxygen (Ar/O2), RF power, gas concentration and deposit...
| Main Authors: | , , , , , , |
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| Format: | Article |
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Elsevier Editora
2020
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