Sensing mechanism of an optimized room temperature optical hydrogen gas sensor made of zinc oxide thin films
Using the radiofrequency (RF) magnetron sputtering method, zinc oxide (ZnO) thin films were optimized for the optical hydrogen gas sensor at 27 °C. To generate optically controlled thin films, the following parameters have been optimized: argon/oxygen (Ar/O2), RF power, gas concentration and deposit...
| Main Authors: | , , , , , , |
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| Format: | Article |
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Elsevier Editora
2020
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| _version_ | 1825952189445570560 |
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| author | Mustaffa, Siti Nor Aliffah Ariffin, Nurul Assikin Khalaf, Ahmed Lateef Yaacob, Mohd. Hanif Tamchek, Nizam Paiman, Suriati Sagadevan, Suresh |
| author_facet | Mustaffa, Siti Nor Aliffah Ariffin, Nurul Assikin Khalaf, Ahmed Lateef Yaacob, Mohd. Hanif Tamchek, Nizam Paiman, Suriati Sagadevan, Suresh |
| author_sort | Mustaffa, Siti Nor Aliffah |
| collection | UPM |
| description | Using the radiofrequency (RF) magnetron sputtering method, zinc oxide (ZnO) thin films were optimized for the optical hydrogen gas sensor at 27 °C. To generate optically controlled thin films, the following parameters have been optimized: argon/oxygen (Ar/O2), RF power, gas concentration and deposition time. As a result, ZnO thin films optimized at 4 % of O2, 150 W RF and 180 min gas concentration. This work focused on the effect of deposition parameters that included deposition time, RF power, argon/oxygen (Ar/O2) gas percentage, and annealing condition on thin-film thickness, surface roughness, crystal phase, phonon modes, and optical bandgap. From the physical characterization, we found that the formed product is crystalline in nature (powdered XRD) and Attenuated Total Reflection Fourier-Transform Infrared Spectroscopy (ATR-FTIR) analysis provided the surface functionality and bonding, while the UV–vis spectroscopy for the optical properties. AFM images show that the surface roughness is varying from 18.9 to 89.83 nm. The gas sensing mechanism of the RF-sputtered ZnO thin film was based on the surface reaction between adsorbed oxygen and the H2 gas where more oxygen was chemisorbed in the form of O2−, O−, and O2- by ZnO thin film. The calculated molar absorptivity, ε increased with the increase of RMS surface roughness whereby relatively high surface roughness is better to optically absorb H2 gas. |
| first_indexed | 2024-03-06T10:41:14Z |
| format | Article |
| id | upm.eprints-85793 |
| institution | Universiti Putra Malaysia |
| last_indexed | 2024-03-06T10:41:14Z |
| publishDate | 2020 |
| publisher | Elsevier Editora |
| record_format | dspace |
| spelling | upm.eprints-857932023-09-05T03:14:15Z http://psasir.upm.edu.my/id/eprint/85793/ Sensing mechanism of an optimized room temperature optical hydrogen gas sensor made of zinc oxide thin films Mustaffa, Siti Nor Aliffah Ariffin, Nurul Assikin Khalaf, Ahmed Lateef Yaacob, Mohd. Hanif Tamchek, Nizam Paiman, Suriati Sagadevan, Suresh Using the radiofrequency (RF) magnetron sputtering method, zinc oxide (ZnO) thin films were optimized for the optical hydrogen gas sensor at 27 °C. To generate optically controlled thin films, the following parameters have been optimized: argon/oxygen (Ar/O2), RF power, gas concentration and deposition time. As a result, ZnO thin films optimized at 4 % of O2, 150 W RF and 180 min gas concentration. This work focused on the effect of deposition parameters that included deposition time, RF power, argon/oxygen (Ar/O2) gas percentage, and annealing condition on thin-film thickness, surface roughness, crystal phase, phonon modes, and optical bandgap. From the physical characterization, we found that the formed product is crystalline in nature (powdered XRD) and Attenuated Total Reflection Fourier-Transform Infrared Spectroscopy (ATR-FTIR) analysis provided the surface functionality and bonding, while the UV–vis spectroscopy for the optical properties. AFM images show that the surface roughness is varying from 18.9 to 89.83 nm. The gas sensing mechanism of the RF-sputtered ZnO thin film was based on the surface reaction between adsorbed oxygen and the H2 gas where more oxygen was chemisorbed in the form of O2−, O−, and O2- by ZnO thin film. The calculated molar absorptivity, ε increased with the increase of RMS surface roughness whereby relatively high surface roughness is better to optically absorb H2 gas. Elsevier Editora 2020 Article PeerReviewed Mustaffa, Siti Nor Aliffah and Ariffin, Nurul Assikin and Khalaf, Ahmed Lateef and Yaacob, Mohd. Hanif and Tamchek, Nizam and Paiman, Suriati and Sagadevan, Suresh (2020) Sensing mechanism of an optimized room temperature optical hydrogen gas sensor made of zinc oxide thin films. Journal of Materials Research and Technology, 9 (5). 10624 - 10634. ISSN 2238-7854; ESSN: 2214-0697 https://www.sciencedirect.com/science/article/pii/S2238785420315854#:~:text=The%20gas%20sensing%20mechanism%20of,2%2D%20by%20ZnO%20thin%20film. 10.1016/j.jmrt.2020.07.086 |
| spellingShingle | Mustaffa, Siti Nor Aliffah Ariffin, Nurul Assikin Khalaf, Ahmed Lateef Yaacob, Mohd. Hanif Tamchek, Nizam Paiman, Suriati Sagadevan, Suresh Sensing mechanism of an optimized room temperature optical hydrogen gas sensor made of zinc oxide thin films |
| title | Sensing mechanism of an optimized room temperature optical hydrogen gas sensor made of zinc oxide thin films |
| title_full | Sensing mechanism of an optimized room temperature optical hydrogen gas sensor made of zinc oxide thin films |
| title_fullStr | Sensing mechanism of an optimized room temperature optical hydrogen gas sensor made of zinc oxide thin films |
| title_full_unstemmed | Sensing mechanism of an optimized room temperature optical hydrogen gas sensor made of zinc oxide thin films |
| title_short | Sensing mechanism of an optimized room temperature optical hydrogen gas sensor made of zinc oxide thin films |
| title_sort | sensing mechanism of an optimized room temperature optical hydrogen gas sensor made of zinc oxide thin films |
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