Performance reduction and discrepancies between supported and suspended 1D photonic-crystal/photonic-wire with medium extended microcavity length
We report the performance of silicon-on-insulator medium-length extended microcavity (3 to 4.5 μm long) one-dimensional photonic crystal waveguide. Quality-factor (Q-factor) values ranging from 2000 to 37,000 were observed. The waveguides/wire were fabricated using an inductively coupled plasma rea...
| Main Authors: | , , , , , |
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| Format: | Article |
| Published: |
S P I E - International Society for Optical Engineering
2021
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