Brief: fabrication processes of silicon-on-insulator and Lateral bipolar transistors
Silicon on Insulator (SOI) has long been the forerunner of the CMOS technology in the last decade offering superior CMOS with higher speed, higher density, and excellent radiation hardness and reduced second order effects for submicron VLSI applications. The traditional SOI structure consists of...
| Main Authors: | , , , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2008
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| Subjects: | |
| Online Access: | http://eprints.usm.my/34464/1/HBP20.pdf |