Polycrystalline GaN Layer On M-Plane Sapphire Substrate For Metal-Semiconductor-Metal Photodetector
This thesis describes work on depositing polycrystalline gallium nitride (GaN) on m-plane sapphire substrate using cost effective physical deposition technique; electron beam (e-beam) evaporator and radio frequency (RF) sputtering, followed by annealing treatment in ammonia (NH3) ambient. The work w...
Main Author: | Kamarulzaman, Azharul Ariff |
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Format: | Thesis |
Language: | English |
Published: |
2017
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Subjects: | |
Online Access: | http://eprints.usm.my/42902/1/AZHARUL_ARIFF__KAMARULZAMAN.pdf |
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