Effects of Substrate Temperature on the Properties of Indium Nitride Thin Films Grown on Flexible Prepared by Reactive Sputtering Method
In this study, indium nitride (InN) thin films were deposited on kapton polymide flexible substrate by reactive radio frequency (RF) sputtering method using indium target in a mixture of Ar and N2 gases. The InN thin films were deposited under different substrate temperatures, i.e., 1 00°C and 20...
| Main Authors: | , , , |
|---|---|
| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2015
|
| Subjects: | |
| Online Access: | http://eprints.usm.my/48735/1/Section%20C%20157-2.pdf%20cut.pdf |