Influence of Annealing Temperature on InN Thin Films Grown by RF Magnetron Sputtering
This paper presents the study and characterization of indium nitride (InN) films grown on quartz glass and p-Si (111) substrates by RF magnetron sputtering method using pure indium target in argon (Ar) and nitrogen (N 2) environment. The characterization was carried out by high resolution X-ray di...
| Main Authors: | , , |
|---|---|
| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2016
|
| Subjects: | |
| Online Access: | http://eprints.usm.my/48795/1/ZO3.pdf%20done.pdf |