Growth Temperature Dependence of Sol-gel Spin Coated Indium Nitride Thin Films

The study highlights on the effects of growth temperatures on the properties of ind ium nitride (InN) th in films prepared by sol-gel spin coating method, followed by nitridation process at temperature ranging from 500 to 650 °C The entire growth process was studied in depth X-ray diffraction meas...

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Bibliographic Details
Main Authors: Lee, Zhi Yin, Ng, Sha Shiong, Yam, Fang Kwong, Zainuriah, Hassan
Format: Conference or Workshop Item
Language:English
Published: 2017
Subjects:
Online Access:http://eprints.usm.my/48802/1/NG17_OP05.pdf%20done.pdf