Effect Of Post-Annealing In Oxygen Environment On Ito Thin Films Deposited Using RF Magnetron Sputtering
This work demonstrated the effect of post-annealing on electrical and optical properties of indium tin oxide (ITO) thin films. ITO with 100 nm thickness successfully deposited using radio frequency (RF) magnetron sputtering in oxygen-free environment on soda-lime glass substrate without substrate he...
| Main Authors: | , , , , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2019
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| Subjects: | |
| Online Access: | http://eprints.usm.my/48902/1/ICoSeMT%202019%20ABSTRACT%20BOOK%2091.pdf |