Thin Film Undoped And P-Doped GaN As Sensor
A GaN thin film based sensor is demonstrated for sensing detection. The GaN thin film was grown on a sapphire substrate by using Metal Organic Chemical Vapour Deposition (MOCVD). An undoped and p-doped GaN thin film were used to investigate their reaction upon exposure. The interaction between the...
Main Authors: | , , , |
---|---|
Format: | Conference or Workshop Item |
Language: | English |
Published: |
2020
|
Subjects: | |
Online Access: | http://eprints.usm.my/49100/1/ABSTRACT%20BOOK%20MNRG%202020.pdf%20cut%2081.pdf |