Development Of Micro Heating Element By Optical Lithography On Alumina Substrate
Optical lithography has been used to deposit resist coatings with desired pattern on flat substrate typically silicon wafer. Yet, rather little attention has been given to the development of Fe-Cr-Al alloys on alumina substrate. Thus, a particular interest has been given to the study of Fe-Cr-Al...
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Format: | Monograph |
Language: | English |
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Universiti Sains Malaysia
2017
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Online Access: | http://eprints.usm.my/53556/1/Development%20Of%20Micro%20Heating%20Element%20By%20Optical%20Lithography%20On%20Alumina%20Substrate_Tan%20Teong%20Sheng_M4_2017.pdf |