Development Of Micro Heating Element By Optical Lithography On Alumina Substrate
Optical lithography has been used to deposit resist coatings with desired pattern on flat substrate typically silicon wafer. Yet, rather little attention has been given to the development of Fe-Cr-Al alloys on alumina substrate. Thus, a particular interest has been given to the study of Fe-Cr-Al...
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| Format: | Monograph |
| Language: | English |
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Universiti Sains Malaysia
2017
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| Online Access: | http://eprints.usm.my/53556/1/Development%20Of%20Micro%20Heating%20Element%20By%20Optical%20Lithography%20On%20Alumina%20Substrate_Tan%20Teong%20Sheng_M4_2017.pdf |
| _version_ | 1797013046613245952 |
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| author | Tan, Teong Sheng |
| author_facet | Tan, Teong Sheng |
| author_sort | Tan, Teong Sheng |
| collection | USM |
| description | Optical lithography has been used to deposit resist coatings with desired pattern on flat
substrate typically silicon wafer. Yet, rather little attention has been given to the
development of Fe-Cr-Al alloys on alumina substrate. Thus, a particular interest has
been given to the study of Fe-Cr-Al alloys deposition on alumina substrate as micro
heating element of low temperature range thermionic energy converter. The features of
micro heating element were printed on alumina substrate to form a SU-8 resist mask by
optical lithography method. Micro heating element of Fe-Cr-Al alloy obtained by
stripping the SU-8 resist after thermal evaporation, have been studied and measured by
SEM. The resist on alumina substrate were not stripped completely even using NMP
solvent as the lift-off solvent. The surface irregularities and porosity of as-sintered
alumina has caused the resist to diffuse into the pores and adhere strongly to the alumina
surface. The resist remains on the surface of alumina substrate even after ultrasonic
agitation was used to energies the stripping process. The feature dimension of micro
heating element on alumina substrate deviate from the desired dimension due to surface
irregularities which leads to pattern deviation. |
| first_indexed | 2024-03-06T15:56:29Z |
| format | Monograph |
| id | usm.eprints-53556 |
| institution | Universiti Sains Malaysia |
| language | English |
| last_indexed | 2024-03-06T15:56:29Z |
| publishDate | 2017 |
| publisher | Universiti Sains Malaysia |
| record_format | dspace |
| spelling | usm.eprints-535562022-07-24T12:39:14Z http://eprints.usm.my/53556/ Development Of Micro Heating Element By Optical Lithography On Alumina Substrate Tan, Teong Sheng T Technology TJ Mechanical engineering and machinery Optical lithography has been used to deposit resist coatings with desired pattern on flat substrate typically silicon wafer. Yet, rather little attention has been given to the development of Fe-Cr-Al alloys on alumina substrate. Thus, a particular interest has been given to the study of Fe-Cr-Al alloys deposition on alumina substrate as micro heating element of low temperature range thermionic energy converter. The features of micro heating element were printed on alumina substrate to form a SU-8 resist mask by optical lithography method. Micro heating element of Fe-Cr-Al alloy obtained by stripping the SU-8 resist after thermal evaporation, have been studied and measured by SEM. The resist on alumina substrate were not stripped completely even using NMP solvent as the lift-off solvent. The surface irregularities and porosity of as-sintered alumina has caused the resist to diffuse into the pores and adhere strongly to the alumina surface. The resist remains on the surface of alumina substrate even after ultrasonic agitation was used to energies the stripping process. The feature dimension of micro heating element on alumina substrate deviate from the desired dimension due to surface irregularities which leads to pattern deviation. Universiti Sains Malaysia 2017-06-01 Monograph NonPeerReviewed application/pdf en http://eprints.usm.my/53556/1/Development%20Of%20Micro%20Heating%20Element%20By%20Optical%20Lithography%20On%20Alumina%20Substrate_Tan%20Teong%20Sheng_M4_2017.pdf Tan, Teong Sheng (2017) Development Of Micro Heating Element By Optical Lithography On Alumina Substrate. Project Report. Universiti Sains Malaysia, Pusat Pengajian Kejuruteraan Mekanik. (Submitted) |
| spellingShingle | T Technology TJ Mechanical engineering and machinery Tan, Teong Sheng Development Of Micro Heating Element By Optical Lithography On Alumina Substrate |
| title | Development Of Micro Heating Element By Optical Lithography On Alumina Substrate |
| title_full | Development Of Micro Heating Element By Optical Lithography On Alumina Substrate |
| title_fullStr | Development Of Micro Heating Element By Optical Lithography On Alumina Substrate |
| title_full_unstemmed | Development Of Micro Heating Element By Optical Lithography On Alumina Substrate |
| title_short | Development Of Micro Heating Element By Optical Lithography On Alumina Substrate |
| title_sort | development of micro heating element by optical lithography on alumina substrate |
| topic | T Technology TJ Mechanical engineering and machinery |
| url | http://eprints.usm.my/53556/1/Development%20Of%20Micro%20Heating%20Element%20By%20Optical%20Lithography%20On%20Alumina%20Substrate_Tan%20Teong%20Sheng_M4_2017.pdf |
| work_keys_str_mv | AT tanteongsheng developmentofmicroheatingelementbyopticallithographyonaluminasubstrate |