Design And Fabrication Of Semi-Auto Wafer Scriber For 4-In And 8-In Wafers
High demanding in semiconductor on wafer make fabrication of wafer keep increase years by years. Before a semiconductor device can be built, silicon must turn into a wafer which begins the growth of silicon ingot. Polysilicon crystal that formed by many small single crystals came with different orie...
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| Format: | Monograph |
| Language: | English |
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Universiti Sains Malaysia
2018
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| Online Access: | http://eprints.usm.my/54167/1/Design%20And%20Fabrication%20Of%20Semi-Auto%20Wafer%20Scriber%20For%204-In%20And%208-In%20Wafers_Illma%20Laili%20Yasmin%20Tarmizi_M4_2018.pdf |