Molecular Dynamics Simulation Of Pdms Nanostructure Distortion In Soft Lithography Demolding Process
In this thesis, the distortion of PDMS nanostructures in the demolding process of the soft lithography process was studied and investigated using the computational method. Nanoimprint lithography uses the simple concept of material displacement by mechanical contact. While the idea is simple, many f...
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| Format: | Thesis |
| Language: | English |
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2021
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| Online Access: | http://eprints.usm.my/55308/1/Molecular%20Dynamics%20Simulation%20Of%20Pdms%20Nanostructure%20Distortion%20In%20Soft%20Lithography%20Demolding%20Process.pdf |