FEA MEMS Packaging For Sensor
Mechanical characteristics of a sensor microbeam based on resonance frequency for gas detection and their dependence on the geometry and materials is investigated in this paper. These microbeam structures will be modeled in Finite Element Analysis software (ANSYS 7.0). The microbeam structu...
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| Format: | Monograph |
| Language: | English |
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Universiti Sains Malaysia
2005
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| Online Access: | http://eprints.usm.my/58170/1/Fea%20MEMS%20Packaging%20For%20Sensor_Maswandy%20Abdullah%40Muhamad.pdf |