Deposition of ZnO-Al (AZO) thin films for optical properties

Zinc Oxide (ZnO) is an inorganic compound and it is doped with aluminum to increase its capabilities. Aluminum Zinc Oxide (AZO) thin films are semiconductor materials that have band gap energy of 3.3eV. Various method of deposition have been study to growth AZO thin films. It has been extensively...

Full description

Bibliographic Details
Main Authors: Hussin, R., Anuar, S. Z. S., Ibharim, S. A., Kamdi, Z., Ainuddin, A. R., Harun, Z.
Format: Conference or Workshop Item
Language:English
Published: 2021
Subjects:
Online Access:http://eprints.uthm.edu.my/2796/1/P12713_9c6d533035b070a3183aee92d4af5889.pdf