Development of low coast atmospheric pressure plasma jet for nano and bio technology applications
The development of cold atmospheric plasma (CAP) can overcome many limitations of low pressure plasma. Low temperature plasma is widely used in the semiconductor and medical industry for cleaning purposes. However, the process is time consuming because low pressure plasma requires vacuum environment...
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| Format: | Thesis |
| Language: | English English English |
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2018
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| Online Access: | http://eprints.uthm.edu.my/411/1/24p%20ELFA%20RIZAN%20RIZON.pdf http://eprints.uthm.edu.my/411/2/ELFA%20RIZAN%20RIZON%20COPYRIGHT%20DECLARATION.pdf http://eprints.uthm.edu.my/411/3/ELFA%20RIZAN%20RIZON%20WATERMARK.pdf |