Improved resistivity and surface morphology of laser treated Cr/Pd metal contact sputter deposited on Si
In this paper Cr/Pd metal contacts were deposited on Si by using DC magnetron sputtering. The metal contacts were treated using infrared Nd:YAG pulsed laser at different laser pulse energy. The metal contacts were characterized based on electrical, optical and morphology properties by using four-poi...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
UTHM Publisher
2017
|
| Subjects: | |
| Online Access: | http://eprints.uthm.edu.my/4757/1/AJ%202017%20%28616%29.pdf |