Nanofabrication process by reactive ion etching of polystyrene nanosphere on silicon surface
Nanospheres made of organic polymer have been applied to generate various patterning mask in fabricating functional nanostructures. The patterning and generation of semiconductor nanostructures through nanospheres mask provides a potential alternative to the conventional top-down fabrication techniq...
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
UTHM Publisher
2017
|
| Subjects: | |
| Online Access: | http://eprints.uthm.edu.my/4852/1/AJ%202017%20%28674%29.pdf |