Effects of pulsed Nd:YAG laser on Pt/Ag thin film metal contacts

This study focused on the effect of laser annealing on Pt/Ag metal contacts deposited on Silicon, (Si) substrates. DC sputtering was used to deposit the metal thin films on the Si. The samples were treated by annealing using pulsed Nd:YAG laser. Then, the samples were characterized based on its morp...

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Bibliographic Details
Main Authors: Bhari, Bibi Zulaika, Ali, Ahmad Hadi
Format: Article
Published: Science Publishing Corporation 2018
Subjects: