Simulation, fabrication and characterization of NMOS transistor

This thesis explains the recipe module development for the first Long Channel NMOS transistor device fabrication process at cleanroom laboratory of KUiTTHO. A recipe for the NMOS transistor fabrication process has been successfully produced. Threshold Voltage and Leakage Current, with different...

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Bibliographic Details
Main Author: Rifai, Damhuji
Format: Thesis
Language:English
English
English
Published: 2006
Subjects:
Online Access:http://eprints.uthm.edu.my/7107/1/24p%20DAMHUJI%20%20RIFAI.pdf
http://eprints.uthm.edu.my/7107/2/DAMHUJI%20%20RIFAI%20COPYRIGHT%20DECLARATION.pdf
http://eprints.uthm.edu.my/7107/3/DAMHUJI%20%20RIFAI%20WATERMARK.pdf