An attention-augmented convolutional neural network with focal loss for mixed-type wafer defect classification.
Silicon wafer defect classification is crucial for improving fabrication and chip production. Although deep learning methods have been successful in single-defect wafer classification, the increasing complexity of the fabrication process has introduced the challenge of multiple defects on wafers, wh...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Institute of Electrical and Electronics Engineers Inc.
2023
|
| Subjects: | |
| Online Access: | http://eprints.utm.my/104909/1/MohdIbrahimShapiai2023_AnAttentionAugmentedConvolutionalNeuralNetwork.pdf |