Humidity effects on the electrical properties of hexagonal boron nitride thin films
Thin films of hexagonal boron nitride (h-BN) were grown by a plasma enhanced chemical vapour deposition (PECVD) technique. The quality of the films was assessed by infrared spectroscopy, microRaman spectroscopy as a function of annealing temperature and by X-ray photoelectron spectroscopy. The films...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Published: |
Elsevier
2005
|
| Subjects: |