The fabrication, characterization and testing of a MEMS circular diaphragm mass sensor
This paper presents a discussion on the fabrication, characterization and testing of a degenerate mode resonant mass sensor which takes the form of a crystalline silicon MEMS circular diaphragm. The device is fabricated from the device layer of a SOI wafer which is bonded anodically to a Pyrex subst...
| Main Authors: | , , , , , , , , |
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| Format: | Article |
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Institute of Physics Publishing
2008
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