UV-Vis characterization of diamond-like carbon thin films deposited using (DC-PECVD)

A study of optical properties of Diamond-like Carbon Thin Films deposited by DC-PECVD. The films was deposited on the corning with the ratio of Hydrogen, H2 (97%) and Methane, CH4 (3%). The temperatures were varied between 200°C to 600°C while maintaining other important variables such as DC voltage...

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Bibliographic Details
Main Author: Ab. Rahman, Nur Alifah
Format: Thesis
Language:English
Published: 2010
Subjects:
Online Access:http://eprints.utm.my/16745/7/NurAlifahAbMFSA2010.pdf