The optical characterization of hydrogenated amorphous carbon thin films deposited by a DC-PECVD method

Diamond-like carbon (DLC) is a metastable form of amorphous carbon with attractive properties such as high hardness, low friction, chemical inertness and high wear resistance.

Bibliographic Details
Main Author: Sakrani, Samsudi
Format: Conference or Workshop Item
Published: 2003
Subjects: