Microwave characterization of silicon wafer using rectangular dielectric waveguide
A non-destructive and easy to use method is presented to characterize p-type and n-type silicon semiconductor wafers using a rectangular dielectric waveguide measurement (RDWG) system. The measurement system consists of a vector network analyzer (VNA), a pair of coaxial cable, coaxial to waveguide a...
| Main Authors: | , , , |
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| Format: | Book Section |
| Published: |
IEEE
2005
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| Subjects: |