Influence of growth time on morphology and structural properties of silicon nanowires grown by VHF-PECVD
In this research, gold catalyzed silicon nanowires (SiNWs) were synthesized on a Si(111) substrate using very high frequency plasma enhanced chemical vapor deposition method based on a vaporliquidsolid growth mechanism at various growth durations. The results showed that the obtained SiNWs were need...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Published: |
Elsevier B.V.
2011
|
| Subjects: |