Morphological and optical characteristics of porous silicon structure formed by electrochemical etching
Porous silicon (PS) structures are prepared by electrochemical etching method using HF and ethanol as a electrolyte solution. The surface and cross-sectional morphology and optical characteristics of the formed PS structures as a dependence of the anodization time are studied. Although the anodizati...
| Main Authors: | , , , , , , |
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| Format: | Book Section |
| Published: |
American Institute of Physics
2011
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| Subjects: |