Morphological and optical characteristics of porous silicon structure formed by electrochemical etching
Porous silicon (PS) structures are prepared by electrochemical etching method using HF and ethanol as a electrolyte solution. The surface and cross-sectional morphology and optical characteristics of the formed PS structures as a dependence of the anodization time are studied. Although the anodizati...
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Bibliographic Details
Main Authors: |
Astuti, B.,
Rusli, N. I.,
Hashim, Abdul Manaf,
Othaman, Z.,
Nafarizal, N.,
Al Obaidi, Nihad K. Ali,
Mat Safri, Norlaili |
Format: | Book Section
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Published: |
American Institute of Physics
2011
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Subjects: | |