Germanium nanoislands grown by radio frequency magnetron sputtering grown germanium nanoislands: annealing time dependent surface morphology and photoluminescence
Structural and optical properties of ~ 20 nm Ge nanoislands grown on Si(100) by radio frequency (rf) magnetron sputtering under varying annealing conditions are reported. Rapid thermal annealing at a temperature of 600°C for 30 s, 90 s, and 120 s are performed to examine the influence of annealing t...
| Main Authors: | , , , |
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| Format: | Article |
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IOP Publishing Ltd.
2013
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