Effects of pattern dimensions on stabilization of crystal orientation for (111) geoninsulator in rapid melting growth

(111)-oriented Ge-on-insulator (GOI) is the key material structure for next generation multifunctional large scale integrated circuits. The (111) GOI structure can be implemented for high-speed transistor channels, as well as templates for the integration of optoelectronic and spintronic materials...

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Bibliographic Details
Main Authors: Suzzaman, Mohammad Ani, Muta, Shunpei, Hashim, Abdul Manaf, Sadoh, Taizoh
Format: Article
Published: 2013
Subjects: