Simulation and fabrication of extended gate ion sensitive field effect transistor for biosensor application
In this paper, we present the Extended Gate Ion Sensitive Field Effect Transistor (EGFET) which has a same function as the Ion Sensitive Field Effect Transistor (ISFET). In contrast to the traditional ISFET, the EGFET retains the original metal/polysilicon portion of the gate electrode and the sensi...
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| Format: | Article |
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2012
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