Aluminum-copper bilayers thin films deposited at room temperature by RF magnetron sputtering
In this work, the effects of room temperature deposition on the structural properties of Al-Cu bilayers thin films were investigated. The bilayers were sputter deposited by RF magnetron sputtering on Si {100} wafers without substrate heating. The thickness of each layer is approximately 500 nm thick...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Trans Tech Publication
2014
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| Subjects: | |
| Online Access: | http://eprints.utm.my/51753/1/ZulhelmiAlifAbdul2014_Aluminum-copperbilayersthinfilms.pdf |