Analysis of micropatterned wireless resonant heaters for wireless-control of MEMS thermal actuators
This paper reports a study on wireless radiofrequency (RF) power transfer to and heat generation in micropatterned coils for wireless control of thermally-driven microdevices. Inductor-capacitor circuits with the planar spiral coils act as RF receivers as well as frequency-sensitive wireless heaters...
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Published: |
Springer-Verlag Berlin Heidelberg
2014
|
| Subjects: |