Design and construction of micro fabrication cleanroom for teaching microelectronic undergraduate
This paper describes about the experience of Kolej Universiti Kejuruteraan Utara Malaysia (KUKUM) establishing the Micro Fabrication Cleanroom (MFC). This facility is mainly designed for teaching undergraduate microelectronic course leading to a Bachelor’s degree. With the construction of its “M...
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Faculty of Electrical Engineering
2006
|
| Subjects: | |
| Online Access: | http://eprints.utm.my/54/1/paper8dec06.pdf |