Fabrication of conical micropore structure on silicon nitride/silicon using focused ion beam milling for biosensor application
We report the fabrication of conical shape micropore structures on silicon nitride/silicon (Si3N4/Si) substrate to function as a fluidic channel as well as a supporting structure for sensing membrane. Excellent shape of conical structure with large diameter of top hole size and small diameter of bot...
| Main Authors: | , , , , |
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| Format: | Article |
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Elsevier
2015
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