Metal oxide film deposition by ASPPS with suction type feedstock feeder
Solution precursor plasma spray (SPPS) is hoped to be a rapid functional film deposition process because of high chemical reactivity of its thermal plasma jet. In this study, in order to promote the reproducibility of film deposition by stable and continuous feedstock feeding in case of atmospheric...
| Main Authors: | , , , |
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| Format: | Conference or Workshop Item |
| Published: |
2015
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| Subjects: |