Simulation of MEMS capacitive thermal sensor based on tip deflection of a functionally graded micro-beam
This work presents a simulation study on a novel micro thermal sensor to evaluate a different range of temperature. Micro Electro Mechanical Systems (MEMS) technology is an interesting field in mechanics and metrology. In this work, a capacitive micro thermal sensor based on tip deflection of Functi...
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| Format: | Article |
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Trans Tech Publications
2014
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