Vertically-tapered silicon nanowire arrays prepared by plasma enhanced chemical vapor deposition: synthesis, structural characterization and photoluminescence
Vertically aligned silicon nanowires (SiNWs) have been successfully synthesized using pure silane gas as a precursor by very high frequency plasma enhanced chemical vapor deposition (VHF-PECVD) method. The effect of the growth temperature on the morphology, structure and photoluminescence properties...
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Elsevier
2014
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