Wireless displacement sensing of micromachined spiral-coil actuator using resonant frequency tracking
This paper reports a method that enables real-time displacement monitoring and control of micromachined resonant-type actuators using wireless radiofrequency (RF. The method is applied to an out-of-plane, spiral-coil microactuator based on shape-memory-alloy (SMA. The SMA spiral coil forms an induct...
| Main Authors: | , , , , |
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| Format: | Article |
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MDPI AG
2014
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