Electron microscopy analysis of microstructure of postannealed aluminum nitride template
The microstructure of an AlN template after high-temperature annealing was investigated by transmission electron microscopy (TEM). The AlN template was prepared by depositing an AlN layer of about 200nm thickness on a sapphire (0001) substrate by metal-organic vapor phase epitaxy. The AlN template w...
| Main Authors: | , , , , , , , , , |
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| Format: | Article |
| Published: |
Japan Society of Applied Physics
2016
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| Subjects: |